Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture Full article
Journal |
Coatings
ISSN: 2079-6412 |
||||||
---|---|---|---|---|---|---|---|
Output data | Year: 2023, Volume: 13, Number: 2, Article number : 310, Pages count : DOI: 10.3390/coatings13020310 | ||||||
Authors |
|
||||||
Affiliations |
|
Cite:
Ermakova E.
, Kolodin A.
, Fedorenko A.
, Yushina I.
, Shayapov V.
, Maksimovskiy E.
, Kosinova M.
Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture
Coatings. 2023. V.13. N2. 310 . DOI: 10.3390/coatings13020310 WOS OpenAlex
Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture
Coatings. 2023. V.13. N2. 310 . DOI: 10.3390/coatings13020310 WOS OpenAlex
Identifiers:
Web of science: | WOS:000938378000001 |
OpenAlex: | W4318480590 |
Citing:
DB | Citing |
---|---|
Web of science | 8 |