Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture Научная публикация
Журнал |
Coatings
ISSN: 2079-6412 |
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Вых. Данные | Год: 2023, Том: 13, Номер: 2, Номер статьи : 310, Страниц : DOI: 10.3390/coatings13020310 | ||||||
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Организации |
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Библиографическая ссылка:
Ermakova E.
, Kolodin A.
, Fedorenko A.
, Yushina I.
, Shayapov V.
, Maksimovskiy E.
, Kosinova M.
Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture
Coatings. 2023. V.13. N2. 310 . DOI: 10.3390/coatings13020310 WOS OpenAlex
Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture
Coatings. 2023. V.13. N2. 310 . DOI: 10.3390/coatings13020310 WOS OpenAlex
Идентификаторы БД:
Web of science: | WOS:000938378000001 |
OpenAlex: | W4318480590 |
Цитирование в БД:
БД | Цитирований |
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Web of science | 8 |