Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor Full article
Journal |
Coatings
ISSN: 2079-6412 |
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Output data | Year: 2022, Volume: 12, Number: 11, Article number : 1767, Pages count : DOI: 10.3390/coatings12111767 | ||||||
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Cite:
Ermakova E.
, Mogilnikov K.
, Asanov I.
, Fedorenko A.
, Yushina I.
, Kichay V.
, Maksimovskiy E.
, Kosinova M.
Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor
Coatings. 2022. V.12. N11. 1767 . DOI: 10.3390/coatings12111767 WOS OpenAlex
Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor
Coatings. 2022. V.12. N11. 1767 . DOI: 10.3390/coatings12111767 WOS OpenAlex
Identifiers:
Web of science: | WOS:000894691000001 |
OpenAlex: | W4309738712 |
Citing:
DB | Citing |
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Web of science | 4 |