The Crystal Structure of Solid Solutions Formed in the HfO2-Sc2O3 Nanoscale System Full article
Journal |
Journal of Crystal Growth
ISSN: 0022-0248 |
||||
---|---|---|---|---|---|
Output data | Year: 2019, Volume: 523, Article number : 125156, Pages count : 7 DOI: 10.1016/j.jcrysgro.2019.125156 | ||||
Tags | A1. Characterization; A1. Nanostructures; A1. Solid solutions; A1. X-ray diffraction; B1. Alloys; B1. Rare earth compounds | ||||
Authors |
|
||||
Affiliations |
|
Abstract:
Here we report the results of studying the crystal structure of solid solutions films, obtained in the HfO2-Sc2O3 nano-scale system using of ALD process and volatile complex compounds such as of Hf(N(C2H5)2)4 and [Sc(C5H4CH3). A number of phases, that are thermodynamically equilibrium at high temperatures (≥1500 °C), have been synthesized at T = 300 °C. The formation of disordered solid solutions with a fluorite structure and the Hf3Sc4O12 compound with an ordered rhombohedral structural type were observed at varying the scandium concentration from 2 to 30 at.%. The results obtained allowed to conclude that the synthesis temperature is not a parameter that determines the structural types of synthesized phases in the system under study. The formation and stabilization of the nonequilibrium high-temperature phases of solid solutions is initiated by oxygen vacancies, which accumulate when Hf is replaced by scandium in the HfO2 lattice. To identify the synthesized phases a set of methods has been used: XPS, X-ray diffraction, electron diffraction (SAED modes) and HR TEM. Testing metal-insulator-semiconductor (MIS) structures with a series of films under study has demonstrated conventional dynamic volt-ampere characteristics. The high leakage current was observed for all samples with the disordered cubic structure. The injection-type hysteresis without any current leakage signs has been observed at the electric field strength of 106 V/cm for structures with the ordered rhombohedral phase of Hf3Sc4O12. © 2019
Cite:
Smirnova T.P.
, Saraev A.A.
, Korolkov I.V.
, Kitchai V.N.
, Borisov V.O.
The Crystal Structure of Solid Solutions Formed in the HfO2-Sc2O3 Nanoscale System
Journal of Crystal Growth. 2019. V.523. 125156 :1-7. DOI: 10.1016/j.jcrysgro.2019.125156 WOS Scopus РИНЦ ANCAN OpenAlex
The Crystal Structure of Solid Solutions Formed in the HfO2-Sc2O3 Nanoscale System
Journal of Crystal Growth. 2019. V.523. 125156 :1-7. DOI: 10.1016/j.jcrysgro.2019.125156 WOS Scopus РИНЦ ANCAN OpenAlex
Dates:
Submitted: | Jan 17, 2019 |
Accepted: | Jul 15, 2019 |
Published online: | Jul 16, 2019 |
Published print: | Oct 1, 2019 |
Identifiers:
Web of science: | WOS:000478562200013 |
Scopus: | 2-s2.0-85069616068 |
Elibrary: | 41633006 |
Chemical Abstracts: | 2019:1428726 |
Chemical Abstracts (print): | 171:335927 |
OpenAlex: | W2958166897 |