Effect of plasma power on growth process, chemical structure, and properties of PECVD films produced from hexamethyldisilane and ammonia Научная публикация
Журнал |
Surface and Coatings Technology
ISSN: 0257-8972 , E-ISSN: 1879-3347 |
||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|
Вых. Данные | Год: 2024, Том: 490, Номер статьи : 131131, Страниц : DOI: 10.1016/j.surfcoat.2024.131131 | ||||||||||
Авторы |
|
||||||||||
Организации |
|
Библиографическая ссылка:
Ermakova E.
, Shayapov V.
, Saraev A.
, Maximovsky E.
, Kirienko V.
, Khomyakov M.
, Sulyaeva V.
, Kolodin A.
, Gerasimov E.
, Kosinova M.
Effect of plasma power on growth process, chemical structure, and properties of PECVD films produced from hexamethyldisilane and ammonia
Surface and Coatings Technology. 2024. V.490. 131131 . DOI: 10.1016/j.surfcoat.2024.131131 WOS OpenAlex
Effect of plasma power on growth process, chemical structure, and properties of PECVD films produced from hexamethyldisilane and ammonia
Surface and Coatings Technology. 2024. V.490. 131131 . DOI: 10.1016/j.surfcoat.2024.131131 WOS OpenAlex
Идентификаторы БД:
Web of science: | WOS:001283571800001 |
OpenAlex: | W4400616981 |
Цитирование в БД:
Пока нет цитирований